Facility

Glovebox-cluster: A double-purified glovebox-cluster enables fabrication of air-sensitive quantum devices. It includes a cryo-cooled probe station (200 °C to -150 °C) with glovebox-compatible, remotely controlled micromanipulators, and a semi-automatic wire bonder with precision alignment tools.

An integrated high-vacuum PVD system (up to 1400 °C) supports multi-target deposition on 100 x 100 mm substrates with LN₂ cooling. A custom two-rack setup allows low- temperature quantum transport measurements on superconducting nanostructures.

Ultra-High-Vacuum Exfoliation system. Connected to the glovebox, there is a UHV exfoliation and stacking system which enables precise fabrication of 2D materials and van der Waals heterostructures under ultra-clean conditions. Operating across a wide temperature range from

-150 K to 500 K and ultra-high vacuum levels down to 10⁻¹¹ Torr, it ensures pristine interfaces and contamination-free assembly. Fully automated manipulators allow for scalable exfoliation and deterministic stacking with angular precision better than 0.1°, enabling the creation of twisted 2D heterostructures with tunable moiré patterns.

Low-temperature microRaman setup. Our polarization-resolved low-temperature micro- Raman setup enables detailed investigation of vibrational and electronic excitations in 2D materials and heterostructures. With high spatial resolution and cryogenic capabilities, it allows mapping of anisotropic phonon modes and symmetry-dependent Raman responses. The  system is optimized for correlated quantum materials, providing critical insights into lattice dynamics at the nanoscale. Equipped with RayShield  filters, it allows access to ultra-low frequency Raman modes, enabling the study of interlayer vibrations and soft phonons.